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  • Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems

    by Jingmin Li, Chong Liu, Liding Wang ...
    Series series Engineering (R0)
    This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS). The book is divided into eight chapters, including the concept and development of MEMS, principles and application examples of bulk and surface silicon process, ... Read more

    $89.09 USD